The MarSurf WS 1 optical surface metrology system uses white light interferometry to achieve vertical resolution of 0.1 nanometer and provide 3-D measurement. Using MarSurf XT 20 topographical evaluation software, the system can be configured to work both in the lab and on the shop floor. The system’s white light optical sensor enables rapid, high-precision recording of surface topography on a range of materials.
Using white light and a charge-coupled device (CCD) camera, the system is able to collect height information through the field of view of the camera. Both the test surface area and a reference surface built into the objective lens are imaged simultaneously by the camera. During measurement, the Mirau objective is moved in small steps in the Z direction, using a piezo positioner. The resultant interferograms are recorded as image stacks and converted into height data.
Mahr Federal Inc.