Nanopositioning Rotary Stages

The ANT95-R and ANT130-R direct-drive rotary stages have in-position stability of 0.005 arc sec and incremental motion of 0.01 arc sec, using direct-drive technology. They can be used for high-throughput manufacturing applications such as disk-drive and MEMS manufacture and test, fiber-optic device alignment and high-precision laboratory R&D applications.

Aerotech Inc.

(412) 967-6854

www.aerotech.com

REPLY 602

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