MILPITAS, -- Nanometrics Inc., a provider of advanced process control metrology systems, announced financial results for its first quarter ended March 31, 2012.

First quarter highlights include:
  • Revenues of $55.5 million, exceeding guidance and up 23% from the fourth quarter;
  • Record shipments of Atlas(R) flagship metrology systems for optical critical dimension (OCD) process control;
  • Significantly increased shipments of our recently-launched Atlas-II system for OCD;
  • Continued acceleration and expansion of 2X nm and 1X nm OCD recipes on Nanometrics systems, as our customers continue their investments to support high-volume production at these advanced technology nodes; and
  • Initial placements of Nanda SPARK defect inspection tools into strategic accounts for both advanced packaging and lithography process control applications.