New Products

Atomic Force Microscope

Park Systems introduces the Automatic Defect Review (ADR) AFM for 300mm bare wafers, a fully automated AFM solution that improves throughput of AFM defect review by up to 1,000%. The 300mm bare wafer ADR AFM is a new process for identifying defects designed specifically for the semiconductor market without the need of reference markers.  In terms of accuracy and productivity, Park’s new ADR process speeds up and improves the way defects are imaged and analyzed compared with more traditional manual AFM methods of defect review on the market. Furthermore, it is able to do this without the laborious and often damaging reference marks created on a sample wafer. Additionally, this new Park ADR AFM offers a significantly longer tip life than those of competitors by 10x~20x thanks to Park’s ground breaking True Non-Contact Mode AFM technology.

The new 300mm bare wafer ADR provides a fully automated defect review process by AFM from transfer and alignment of defect maps to the survey and zoom-in scan imaging of defects that uses a unique remapping process that does not require any reference marker on a sample wafer. Unlike SEM which leaves destructive irradiation marks, square-shaped, on defect sites after its run, the new Park ADR AFM enables advanced coordinate translation with enhanced vision that uses the wafer edge and notch to automatically enable the linkage between a defect inspection tool and Park AFM. Since it is fully automated, it does not require any separate step to calibrate the stage of the targeted defect inspection system, increasing throughput by up to 1,000 percent.

By utilizing Park’s proprietary coordinate translation technique, the new Park ADR AFM can accurately transfer the defect maps obtained from a laser-scattering defect inspection tool to a 300mm Park AFM system. This allows the AFM for high throughput, fully automated defect imaging. The defects are imaged in two steps; (1) a larger, survey scan image to refine the location, then (2) a smaller, zoom-in scan image to obtain the details of the defect, presenting automatic analysis of the defect type and the subsequent defect dimensions.

 Park Systems

Did you enjoy this article? Click here to subscribe to Quality Magazine. 

You must login or register in order to post a comment.




Karen Spencer, Clinkenbeard's quality manager, discusses what makes the plant stand out, advice for other plants, and looks to the future.
More Podcasts

Quality Magazine


2015 May

The May 2015 edition of Quality Magazine includes articles on cloud technologies, depth gages, ISO 9001, digital inspection and cool new products.

Table Of Contents Subscribe

Topics to Talk About

What topics would you like to see Quality cover more?
View Results Poll Archive

Clear Seas Research

qcast_ClearSeas_logo.gifWith access to over one million professionals and more than 60 industry-specific publications,Clear Seas Research offers relevant insights from those who know your industry best. Let us customize a market research solution that exceeds your marketing goals.


Facebook2015_40 twitter_40px.png  youtube_40px.pnglinkedin_40px.png