Quality Magazine

Albany NanoCollege Purchases Bruker X-Ray Metrology Tools

July 8, 2009
Source: Bruker

ALBANY, NY-Buker AXS, manufacturer of X-ray Diffraction (XRD) instrumentation, has announced that Sematech, a global consortium of semiconductor chipmakers, has ordered the Bruker X-ray tools D8 Fabline and D8 Discover for the X-ray metrology site at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

This new suite of equipment provides Sematech’s metrology program at CNSE’s Albany NanoTech Complex with lab-to-fab X-ray metrology development capability to address the challenges of advanced semiconductor process control and new materials characterization.

“The purchase of Bruker’s state-of-the-art XRD systems, combined with the R&D capabilities and know-how of both Sematech and CNSE, will bring significant benefits to nanoelectronics manufacturers by pinpointing device failures and improving advanced process control,” says Dr. Brad Thiel, CNSE associate professor of nanoscience and director of Sematech’s advanced metrology development program at the Albany NanoCollege. “The addition of these cutting-edge tools provides enhanced resources at CNSE’s Albany NanoTech to support the critical needs of our global corporate partners and the nanoelectronics industry.”

For more information, visit www.sematech.org, www.bruker.com and www.cnse.albany.edu.