Quality Magazine

DFMSim Wins First Metrology integration for Lithography Software

June 29, 2012

PALO ALTO, CA-- Semiconductor software solutions provider DFMSim announced a distribution agreement with a U.S. process control original equipment manufacturer (OEM) that involves the integration of DFMSim’s SMARTlitho manufacturing software into new tools for advanced metrology.

The partnership is DFMSim’s first deal with a metrology leader. The company has similar engagements with other players in the IC design-to-manufacturing ecosystem, including a recent installation of SMARTyield at a development foundry in the US.

“Few technologies can influence cost savings in a fab more dramatically than process control,” says DFMSim chief executive officer, Anantha Sethuraman. “And nowhere is process control more valuable than lithography.

DFMSim executives will be present at SEMICON West 2012 in San Francisco, July 10-12 at the Moscone Center in San Francisco, CA.