"X-ray Metrology in Semiconductor Manufacturing" Book Released
The book is split into three sections. First the book outlines the applications of X-ray metrology and the techniques that are best suited to each application. The second section delves into the techniques and theory behind the applications such as specular X-ray reflectivity, diffraction imaging and defect mapping. The final section provides technological details of each technique, answering questions commonly encountered in practice. The book provides real solutions to semiconductor manufacturing, with a focus on accuracy, repeatability and throughput.
Dr. Keith Bowen, FRS FREng, who established the company's U.S. office in 1996, was a director of Bede until retiring from the Board in 2005. His current position is chief scientist. Professor Brian Tanner, professor of physics and director of technology transfer at Durham University, is a co-founder and a non-executive director of Bede. Keith and Brian have been at the forefront of technological innovations in the field of non-destructive X-ray metrology at Bede since the early 1980s. The two have collectively published more than 400 scientific papers, and co-authored another book published in 1998 titled, "High Resolution X-ray Diffraction and Topography."