Semiconductor test equipment supplier Advantest and Digital Surf announced that PM3D Map software based on Digital Surf’s industry-standard Mountains Technology® is now incorporated into the company’s Multi Vision Metrology Scanning Electron Microscope (MVM-SEM®) series. Advantest’s MVM-SEM® system together with PM3D Map software now provide a complete solution for measuring the dimensions of nanoscale patterns on wafers, photomasks and other substrates.
Available in 11 different languages, PM3D Map software enables visualization of 3D topography in real-time, analysis and generation of complete metrological reports. The new software provides a generous set of features for:
Surface geometry analysis including measurement of the volume of surface structures (bumps, holes), step heights, contours etc.
Separation of surface roughness and waviness using advanced ISO 16610 filtering techniques.