Quality Measurement: Be Precise with Optical Measurement
Ensuring accurate and repeatable measurement of critical dimensions requires strict equipment characteristics.
The decision to use one type or the other is based on the relationship between the accuracy requirement and the size of the area being measured. If the features are small or close enough together that an image of the entire measurement can be captured within the field of view of a microscope, an FOV system is likely to be the cost-effective choice. An FOV system is commonly used for measuring line widths and other small features on semiconductor wafers.