HiPaceä is a line of turbopumps available in pumping speeds that range from 10 to 700 liters per second. The line has a new rotor design that reduces run-up time and provides high gas throughput and compression for light gases. The line is appropriate for use in analytical instrumentation and vacuum processes, semiconductor technology, research and development, and coatings and industrial applications. The line is offered in a variety of drive versions, including Profibus and DeviceNet, without an increase in package size. The integrated drive electronics reduce bulky and costly cabling. The materials prolong drive service life, while proprietary bearing design ensures reliability. The turbopumps can be installed in any orientation and also are available in corrosive-gas versions.

Pfeiffer Vacuum Inc.
(408) 956-2578 ext. 309
www.pfeiffer-vacuum.com