The Zoom 6000, 12X and Precise Eye lens systems are now available with Near Infrared (NIR) coatings. The new NIR systems are optimized for imaging in the 700 to 1,550 nanometer wavelength. These systems incorporate high resolution and sensitivity, and offer zoom magnification ranges from 0.09X to 228X or fixed magnification from 0.30X to 91X. The machine optics were developed to answer customer demand for a cost-effective NIR lens option. The lens systems are designed for a broad range of manufacturing applications including backside photomask registration, SOI bond inspection and internal silicon structure and photoemission microscopy. Field of view and magnification remain unchanged from the non-NIR systems. The flexible modular systems allow for a customized solution. Both zoom or fixed options are available with detents and apertures. The motorized Zoom 6000 NIR and 12X NIR systems facilitate automation of the inspection process beyond manual systems.