Dr. Mike Conroy

Dr. Mike Conroy is business development manager, noncontact metrology for Ametek Taylor Hobson (Leicester, England). For more information, call +44 (0)116 246 3171, e-mail mike.conroy@ametek.co.uk or visit www.taylor-hobson.com.

ARTICLES

Interferometry Advances the Measurement of MEMS

May 1, 2010
The study of micro and nano surface metrology is becoming commonplace in industrial and research environments as structures and surface features become smaller and smaller. One area where this is evident is the expansion of interest in noncontact metrology for measurement of different types of microelectromechanical systems (MEMS) structure.
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