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Onto Innovation’s 4Di InSpec™ Automated Metrology System Receives 2024 Innovative System of the Year Award from FANUC America

Onto Innovation’s 4Di InSpec™ Automated Metrology System

Automated defect and feature metrology system enables new levels of quality and reduced rework for aerospace components further enabling aviation safety standards.

Wilmington, Mass., February 26, 2024

Onto Innovation Inc. (NYSE: ONTO) and its Tucson subsidiary 4D Technology today announced they’ve been named winner of FANUC America’s prestigious 2024 Innovative System of the Year award for the 4Di InSpec automated metrology system (AMS). The system enables automated surface defect and feature metrology for aviation, aerospace and other applications in the industrial manufacturing market. The patented, vibration-immune technology enables the unique capability of using non-contact, three-dimensional optical metrology on the production floor, providing new levels of defect inspection with micrometer-level resolution. In partnership with OptiPro Systems, the 4Di InSpec AMS systems were delivered in the second half of 2023 to several leading aerospace engine manufacturers. “We are honored to be recognized as an innovator by a robotic industry leader like FANUC America,” said Erik Novak, vice president and general manager of Onto Innovation subsidiary 4D Technology. “The combination of FANUC robotics with 4Di non-contact sensor technologies provides a unique platform for improving throughput, quality and delivery times in industrial manufacturing. We look forward to the continued expansion of our automation metrology portfolio to help our customers solve some of the more complex industrial manufacturing challenges in the industry.” The aviation industry is focused on safety amid the ongoing labor shortage post-pandemic, driving a renewed emphasis for an increase in quality control and improved labor utilization. Currently, visual inspection of engines is the standard quality control practice, including repro-rubber and shadowgraph off-line techniques, which are time-consuming and subjective. The industry can utilize the 4Di InSpec automated metrology solution to achieve significantly higher sampling rates and improved quality control while providing fast, accurate and reproducible results. The automated system is capable of measuring 400 typical engine call-out measurements in under 30 minutes, which can take weeks using traditional methods, enabling manufacturers to reallocate labor for other critical tasks. The technology has demonstrated the ability to reduce scrap and rework by up to 40% on engine components. The 4Di InSpec AMS can be configured for multiple applications, including large, rotary applications, small freeform components such as turbine blades and multi-sensor applications. Bob Wasilesky, senior director of sales and marketing for Onto Innovation subsidiary 4D Technology, said, “Multi-sensor, automated systems are the next step to delivering increased value to our customers, where one robot, with dual sensors, can measure surface roughness, surface features and defect inspection all in one system, greatly increasing efficiencies.” To learn more about Onto’s 4Di InSpec automated metrology system, visit the 4D Technology website or contact us.

About 4D Technology 4D Technology, an Onto Innovation subsidiary, is a global leader in the design and manufacture of vibration-insensitive, portable and automated dynamic laser interferometers, optical profilers, and optical surface gauges. Our systems provide precise measurement of surface features, roughness, and defects — even in the most challenging environments. Serving: precision machined surfaces, optics, astronomy, aerospace and defense, space-based telescopes, optical communications, automotive, and in-line production measurements. Additional information can be found at www.4dtechnology.com. About Onto Innovation Inc. Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain combined with our connected thinking approach results in a unique perspective to help solve our customers’ most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. With headquarters and manufacturing in the U.S., Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at www.ontoinnovation.com. Forward Looking Statements This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include statements relating to Onto Innovation’s business momentum and future growth; the benefit to customers and the capabilities of Onto Innovation’s products and customer service; Onto Innovation’s ability to both deliver products and services consistent with our customers’ demands and expectations and strengthen its market position, Onto Innovation’s beliefs about market opportunities as well as other matters that are not purely historical data. Onto Innovation wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Onto Innovation’s control. Such factors include, but are not limited to, the Company’s ability to leverage its resources to improve its position in its core markets; its ability to weather difficult economic environments; its ability to open new market opportunities and target high-margin markets; the strength/weakness of the back-end and/or front-end semiconductor market segments; fluctuations in customer capital spending; the Company’s ability to effectively manage its supply chain and adequately source components from suppliers to meet customer demand; the effects of political, economic, legal, and regulatory changes or conflicts on the Company's global operations; its ability to adequately protect its intellectual property rights and maintain data security; the effects of natural disasters or public health emergencies, such as the COVID-19 pandemic, on the global economy and on the Company’s customers, suppliers, employees, and business; its ability to effectively maneuver global trade issues and changes in trade and export regulations and license policies; the Company’s ability to maintain relationships with its customers and manage appropriate levels of inventory to meet customer demands; and the Company’s ability to successfully integrate acquired businesses and technologies. Additional information and considerations regarding the risks faced by Onto Innovation are available in Onto Innovation’s Form 10-K report for the year ended December 31, 2022, and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Onto Innovation’s current expectations, the Company cannot guarantee any related future results, levels of activity, performance or achievements. Onto Innovation does not assume any obligation to update the forward-looking information contained in this press release, except as required by law.

### Source: Onto Innovation Inc. ONTO-C Contacts: Media: Patricia Browne, +1 (520) 294-5600, [email protected]