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Scanning Electron Microscope

January 28, 2009
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The JSM-7600F is a thermal field emission (FEG) scanning electron microscope (SEM) that integrates a semi-in-lens objective lens with an in-lens thermal electron gun. The SEM minimizes beam damage on heat sensitive samples and offers stability for long-term, unattended data acquisition. A graphical interface enables easy navigation through imaging and analyzing procedures. The in-lens thermal electron gun, combined with a patented aperture angle optimizing lens, achieves a probe current of 200 nanoamperes or higher at an accelerating voltage of 15 kilovolts. The standard five-axis, motor-drive eucentric stage controls sample movement throughout the magnification range from 25X to 1,000,000X. Intuitive specimen control by the track ball ensures smooth movement of the area of view in high magnification imaging.

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