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SurPhase is a stand-alone 3-D video microscope integrating a high-resolution CCD camera, controlled LED illumination and an objective turret with six positions for sample analysis in reflection. It is suited for 3-D surface characterization, combining 2-D video microscopy and 3-D measurement capabilities. The microscope is certified and verified with a traceable calibration standard and provides measurements in the nanometer resolution range according to ISO standards. Automatic acquisition and processing are performed by the GetPhase software package.
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