MILPITAS, CA--- Nanometrics Inc., a provider of advanced process control metrology systems, announced today that James P. Moniz, chief financial officer, has informed the company of his intention to retire on April 1, 2011.

The company has retained an executive search firm to identify an appropriate successor and Mr. Moniz will remain in his role to ensure a seamless transition of the CFO role next year.

Nanometrics’ metrology systems are used primarily in the fabrication of semiconductors, high-brightness LEDs, data storage devices and solar photovoltaics. Nanometrics’ automated and integrated metrology systems measure critical dimensions, device structures, overlay registration, topography and various thin film properties, including film thickness as well as optical, electrical and material properties.