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The nanoscan measures roughness and contour with a single pass, measuring surfaces with a stroke of 24 millimeters and resolution of 0.68 nanometer over the entire measuring range. The system has an integrated software/hardware concept that enables operators to capture micro- and macro-structures of parts with very narrow tolerances in short cycle times. The system is appropriate for producers of high-precision parts and assemblies where contour and roughness features are critical, such as fuel injection and transmission parts, and pumps and valves for automotive, aerospace and medical applications.