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Manufacturers are measuring tool tolerances in microns, finishes are highly polished and possibly diamond coated, making contactless inspection the only acceptable method. Traceability for ISO is a requirement from the reticle certification to gage calibration reports to the tool inspection report.
Manufacturers are measuring tool tolerances in microns, finishes are highly polished and possibly diamond coated, making contactless inspection the only acceptable method. Traceability for ISO is a requirement from the reticle certification to gage calibration reports to the tool inspection report.
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