REHOVOT, ISRAEL-Nova Measuring Instruments Ltd., a provider of stand-alone metrology and integrated metrology solutions to the semiconductor process control market, announced that a foundry has accepted Nova's integrated metrology tools as Production Tool of Record (PTOR) for various technology nodes. The metrology tools will be used in CMP for various applications.
It is the first implementation of an integrated metrology solution in production for this leading foundry following a proof of concept evaluation that clearly showed improvement in production yields and superior ROI. This recent selection of Nova's integrated metrology tools complements previous selections by this particular customer of Nova's most advanced Stand Alone metrology tools and MARS modeling software for production in various technology nodes and different process steps.
This initial order for multiple tools was partially shipped in the first quarter and is expected to complete shipment during the second quarter.
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