LOWELL, MA-MicroSense, LLC, a worldwide high resolution capacitive position sensors, metrology modules and high sensitivity magnetic metrology tools company, announced the acquisition of SigmaTech, Inc. of Tempe, AZ.

SigmaTech has developed award winning, high-sensitivity metrology tools for LED, MEMS and semiconductor manufacturing. With this acquisition, MicroSense adds leading-edge wafer inspection tools to its portfolio of innovative metrology solutions. SigmaTech systems integrate multiple sensing technologies such as optical spectrometry, interferometry and SigmaTech's patented auto-positioning back pressure (APBP) technology. MicroSense will integrate its capacitance sensors into SigmaTech metrology platforms.

"This acquisition makes excellent sense as it marries our leading capacitance sensing technology with SigmaTech's field-proven, highly reliable metrology platform to provide highly stable and repeatable wafer metrology systems for targeted applications," according to James Pelusi, Chairman and CEO of MicroSense. "SigmaTech's customers and prospects will continue to be supported by the existing SigmaTech employees, all of whom will stay with the combined business, and will also benefit from the additional resources, infrastructure and the decades of metrology experience that MicroSense will bring to the business."