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Mahr Inc. MarSurf3D MS Optical Metrology Platform

MarSurf--SX3100--BI.jpg
Mahr
June 25, 2026

Mahr Inc., a leading provider of dimensional metrology solutions, announced the launch of its MarSurf3D MS optical metrology platform, featuring a multisensor measuring head designed to deliver flexibility and modularity with precision. The new 3D optical platform enables manufacturers to easily customize and configure a single measurement system that meets their specific application requirements, eliminating the need to switch between instruments.

The MarSurf3D MS is capable of real-time measurements down to the sub-nanometer range with a flexible multisensor measuring head that combines three distinct area-based measuring technologies:

•    LED Confocal: The patented multi-pinhole technology ensures ultra-fast image capture with the highest signal quality, delivering maximum repeatability down to the nanometer range on nearly any surface condition.

•    White Light Interferometry: Offers vertical resolution in the sub-nanometer range regardless of magnification, making it ideal for measurement of ultra-precise step heights and very low roughness surfaces.

•    Focus Variation with Active Lighting: Developed specifically for measuring the geometry of large, rough surfaces, allowing steeply inclined surfaces (up to 86°) and large vertical ranges to be captured in a single measurement.

 

MarSurf3D MS technology is available with a wide variety of axes off-the-shelf, ranging from 50 x 50 x 35 mm XYZ on the MX3050 portable instrument, up to 500 x 400 x 100 mm XYZ axes on the GS3501. The MarSurf3D MS SX3200, which is on display at IMTS booth #134255, features a compact design with 200 x 75 mm XYZ axes. Built for versatility, this powerful multifunctional tool can be used in laboratories, quality assurance environments, or directly on the production floor. It addresses a broad spectrum of manufacturing applications, including structured, rough, and smooth surfaces, steep flanks, layer thickness, and large height measuring ranges. 

Key features of the MarSurf3D MS platform include:

•    Automation-Ready: Measurements can be fully automated to increase throughput and reduce operator error.

•    Wide range of workpieces: Material-independent measurement of any geometries and surface characteristics regardless of whether they are reflective, absorbent, opaque, or transparent.

•    Intuitive operation: Simple, user-guided interface with automatic modes for all significant measuring parameters, including the use of measurement protocols for known surfaces.

•    Optimal data quality: Excellent precision, accuracy, repeatability, reproducibility, and documentation to ensure traceability and auditability. 

 

“Historically, quality assurance and manufacturing operations had to compromise on surface inspection or invest in multiple costly, single-purpose instruments to handle different materials," said Dr Christian Wichern, PhD, Product Manager at Mahr Inc. "The MarSurf3D MS platform changes that by combining three distinct, high-performance optical technologies into a multisensor system that brings speed, flexibility, and repeatability to 3D surface measurement.”


Mahr Inc.
www.mahr.com

KEYWORDS: 3D measurement manufacturing metrology multisensor measurement optical measurement quality

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